VIP member
Ultra high resolution field emission scanning electron microscope SU8600 series
With the development of rapid data collection and processing technology, electron microscopes have entered an era where not only data quality but also
Product details
Ultra high resolution field emission scanning electron microscope SU8600 series
With the development of rapid data collection and processing technology, electron microscopes have entered an era where not only data quality but also the collection process are valued. The SU8600 series adheres to the high-quality imaging, large beam analysis, and long-term stable cold field imaging technology of the Regulus 8200 series, while greatly improving high-throughput and automatic data acquisition capabilities.
- *
- The equipment photo includes optional items.
-
characteristic
-
specifications
characteristic
characteristic
Ultra high resolution imaging
Hitachi's high brightness electronic source ensures ultra-high resolution images even at ultra-low landing voltages.
An example of observing RHO zeolite under 0.8 kV voltage conditions. The left image shows the overall morphology of the particles, and the right image is an enlarged image. The fine step structure on the surface of the particles is clearly visible. Low voltage observation is more effective in reducing electron beam damage and obtaining surface shape information.
Sample provided by Mr. Yoshida Kamimura from the Japan Institute of Industrial Technology
High contrast low acceleration voltage backscatter image
3D NAND cross-section observation;
Under low acceleration voltage conditions, the backscattered electron signal can clearly show the contrast difference between the silicon oxide layer and the silicon nitride layer.
3D NAND cross-section observation (acceleration voltage: 1.5kV)
Fast BSE imaging: A novel scintillation backscattered electron detector (OCD)*
Due to the use of a new type of OCD detector, even with a scanning time of less than 1 second, clear deep structure images of Fin FET can still be observed
Observation of the internal structure of 5-nanometer process SRAM (acceleration voltage: 30kV, scan time<1 second)
Advanced automation functions*
EM Flow Creator allows customers to create automated workflows for continuous image acquisition. EM Flow Creator defines different SEM functions as graphical modules, such as setting magnification, moving sample position, adjusting focal length, and contrast between light and dark. Users can form a working program by simply dragging and dropping these modules in logical order. After debugging and confirmation, the program can automatically obtain high-quality and reproducible image data every time it is called.
Flexible user interface
Native support for dual displays, providing flexible and efficient operating space. Simultaneously display and save 6 channels to achieve fast multi signal observation and acquisition.
Channel 1, 2, 4, or 6 signals can be displayed simultaneously on the same monitor, with switchable content including SEM detectors, sample chamber cameras, and navigation cameras. The workspace can be expanded by using two displays, and the customizable user interface can improve work efficiency.
specifications
| model | SU8600 series | |
|---|---|---|
| electronic optical system | Resolution of secondary electron image | zero point six nm@15 kV |
| zero point seven nm@1 kV * | ||
| Magnification factor | 20 to 2,000,000 x | |
| electron gun | Cold field emission electron source, supporting flexible scintillation function, including anode baking system. | |
| Accelerating Voltage | 0.5 to 30 kV | |
| Landing voltage | 0.01 to 20 kV | |
| detector | (Some are optional items) | Upper detector (UD) |
| UD ExB energy filter, including SE/BSE signal mixing function | ||
| Lower detector (LD) | ||
| Top detector (TD) | ||
| TD energy filter | ||
| In tube backscattered electron detector (IMD) | ||
| Semiconductor type backscattered electron detector (PD-BSED) | ||
| New scintillation type backscattered electron detector (OCD) | ||
| Cathodic Fluorescence Detector (CLD) | ||
| Scanning Transmission Detector (STEM Detector) | ||
| attachment | (Some are optional items) | Navigation camera, sample room camera, X-ray energy dispersive spectrometer (EDS), backscattered electron diffraction detector (EBSD) |
| software | (Some are optional items) | EM Flow Creator, HD Capture (up to 40960 x 30720 pixels) |
| sample stage | Motor drive shaft | 5-axis motor drive (X/Y/R/Z/T) |
| Motor drive shaft | X：0~110 mm | |
| Y：0~110 mm | ||
| Z：1.5~40 mm | ||
| T：-5~70° | ||
| R：360° | ||
| sample room | Sample size | Maximum diameter: 150 mm |
- *
- Under deceleration mode
Related product classification
- Focused Ion Beam System (FIB/FIB-SEM)
- TEM/SEM Sample Preparation Device
Online inquiry
-
Contacts
-
Company
-
Telephone
-
Email
-
WeChat
-
Verification Code
-
Message Content
-